Automatic wafer exchange system (WHS-T5) 150 mm (6")

The WHS-T5 series is a precision-engineered, automatic wafer exchange system. This design differs in automation from the WHS-T2 series: before the transfer takes place the receiving cassette is automatically moved towards the sent cassette. Designed for an even more safe moving of wafers between two SEMI-compliant cassettes. No risk of touching wafers when placing or taking away a cassette. Specially when a low-profile cassette is involved.  Available for 150 mm, and 200 mm wafers, the WHS-T5 is compatible with high- and low-profile plastic process cassettes, metal cassettes, and most shipping cassettes with an H-BAR. This advanced system ensures smooth and efficient wafer transfers across various semiconductor applications, including shipping/receiving, epitaxial, wet chemistry, and thermal processing areas.

The WHS-T5 is equipped with one-button for the exchange when integrated SEND and RECEIVE stage cassette-in-place sensors are activated. An adjustable transfer arm resistance sensor to detect excessive forces during motion—safeguarding wafer integrity.

Additionally, an ultrasonic sensor provides an extra safety check by detecting if wafers are already present in the RECEIVE cassette when the operator initiates a transfer, further preventing potential errors or wafer damage.

Constructed from antistatic, chemical-resistant materials, the WHS-T5 guarantees a clean, controlled environment, meeting ISO 4 (FS209E Class 10) cleanroom standards. Its versatility makes it suitable for wafer handling in metrology, etch, inspection, probe, and test areas.

Manufactured in an ISO9001 certified facility and CE certified, the WHS-T5 offers a robust, reliable solution for precision wafer transfers in semiconductor manufacturing environments.