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Spin process - 150 mm Integrators
(2)Spin process - 200 mm Integrators
(2)Spin process - 300 mm Integrators
(1)Wafer Cleaning
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Up to 12" (300mm)
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Semi-Automatic
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Category
Spin process - 150 mm Integrators
(2)Spin process - 200 mm Integrators
(2)Spin process - 300 mm Integrators
(1)Wafer Cleaning
(1)Substrate Holder
(1)Wafer size
Up to 12" (300mm)
Substrate size
Semi-Automatic
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Wetprocess
UH119
Wafer Cleaning
ULTRON SYSTEMS
Up to 12" (300mm)
Semi-Automatic