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Wafer size
200 mm (8")
300 mm (12")
Material, bottom grip
Antistatic Polyoxymethylene
Material, top grip
Perfluorocarbon elastomer
Grip hold
Normally closed
Cleanliness
ISO 4 (Class 10 FS209E)
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Category
Wafer size
200 mm (8")
300 mm (12")
Material, bottom grip
Antistatic Polyoxymethylene
Material, top grip
Perfluorocarbon elastomer
Grip hold
Normally closed
Cleanliness
ISO 4 (Class 10 FS209E)
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wafer-handling
WHS-G4
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