RIE
In reactive ion etching (RIE), its etching profile, etching rate, uniformity, and repeatability can be controlled very precisely. Isotropic etching profiles as well as anisotropic are possible.
Filter
thin-films
RIE-sys
RIE
SYSKEY TECHNOLOGY Co., Ltd.
The RIE process is a chemical physical etching process, and is the most important process for constructing various films in semiconductor manufacturing.
