Plasma Etching

155-plasma-etching

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927-ale
ALE
926-icp-rie
ICP-RIE
925-rie
RIE

Dry etching is known as plasma dry etching is the process of removing materials from the surface of another material. This process occurred by collision of excited ions with the material and remove it without using any liquid chemicals or etchants. It is more directional or anisotropic than wet etching process helps reduce sloppy etching and possibly poor electrical reliability.