Thin Films

Systems for thin films, ranging from CVD and ALD atomic layer
deposition to gas filters and heating elements for diffusion ovens.

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Size
up to 1100 x 1300 mm2 (glass)

In-Line Sputter

In-Line sputtering deposition system is that substrates passed linearly beneath one or more sputter cathodes to acquire their thin film coating. And it can just be chains running along rails through the vacuum chamber.

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In-Line Sputtering Deposition System
In-Line-Sputter-Sys
In-Line Sputter
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In-Line Sputtering Deposition System thin-films » Magnetron sputter » In-Line Sputter
In-Line Sputtering Deposition System is that substrates passed linearly beneath one or more sputter cathodes to acquire their thin film coating.
up to 1100 x 1300 mm2 (glass)
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