Thin Films

Systems for thin films, ranging from CVD and ALD atomic layer
deposition to gas filters and heating elements for diffusion ovens.

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up to 12 inch

Co-Sputter

Co-sputtering is simultaneous coating from two or multiple sputtering targets. It is used for compound - alloy or composite material.

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Co-Sputter

thin-films » Magnetron sputter » Co-Sputter
Co-sputtering is simultaneous coating from two or multiple sputtering targets. It is used for compound - alloy or composite material.
up to 12 inch