Thin Films

Systems for thin films, ranging from CVD and ALD atomic layer
deposition to gas filters and heating elements for diffusion ovens.

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Size
up to 12 inch wafers

Plasma enhanced chemical vapor deposition (PECVD)

Plasma enhanced chemical vapor deposition (PECVD) is a chemical vapor deposition (CVD) technology using a plasma to provide some of the energy for the deposition reaction to take place. PECVD alternate for depositing a variety of thin films at lower temperatures than conventional CVD methods without losing film quality.

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PECVD thin-films » CVD » PECVD
PECVD alternate for depositing a variety of thin films at lower temperatures than conventional CVD methods without losing film quality.
up to 12 inch wafers
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