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Low pressure chemical vapor deposition (LPCVD)

Low pressure chemical vapor deposition (LPCVD) is a chemical vapor deposition technology that uses heat to initiate a reaction of a precursor gas on the substrate surface. 

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LPCVD
SYSKEY TECHNOLOGY Co., Ltd.
LPCVD
It can provide some energy for the deposition reaction.
up to 8 inch wafers