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eFOUP
(2)
Size
12" (300 mm)
276 mm
8" (200mm)
Wafer slots
13
25
First wafer position
44 mm
Wafer spacing
10 mm
Type
Front opening unified pod (FOUP)

eFOUP

2products
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process-cassettes
EFOUP300 Front opening unified pod 300 mm wafers
eWB0685-ASSY-1
eFOUP
ePAK
EFOUP300 Front opening unified pod 300 mm wafers
12" (300 mm)
25
44 mm
10 mm
Front opening unified pod (FOUP)
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process-cassettes
Modular eFOUP Front opening unified pod
Modular eFOUP model
eFOUP
ePAK
Modular eFOUP Front opening unified pod
Built-to-order modular eFOUP with fixed inserts. Supports 200mm and 300mm wafers. SEMI/FIMS compliant and compatible with AMHS systems.
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6 Sizes:
Modular eFOUP Front opening unified pod Probe cardModular eFOUP Front opening unified pod 12" (300mm) wafers - 13 slotsModular eFOUP Front opening unified pod 12" (300mm) wafers - 25 slots
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