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photolitho
Beam Maskless Lithography System
Maskless Lithography Systems
POLOS
106 x 106 mm
Table-top system
photolitho
PM-100
Maskless Lithography Systems
POLOS
POLOS PM-100 is a Laser Writer with highest degree of freedom to create microstructures in photosensitive layers.
100 x 100 mm
Table-Top System
< 300 nm features
photolitho
PM-100 Start
Maskless Lithography Systems
POLOS
A versatile UV laser writer with high precision components to get the highest degree of freedom to create microstructures in photosensitive layers.
100 x 100 mm
photolitho
POLOS-PrintUV-Standard
Maskless Lithography Systems
POLOS
Up to 100 mm (4") wafers
Table-top System
photolitho
POLOS® BEAM XL Mk2
Maskless Lithography Systems
POLOS
150 x 150 mm
Table-top system





