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Maskless Lithography Systems
(4)
Max Wafer size
100 x 100 mm
130 x 130 mm
150 x 150 mm
System type
Table-Top System
Structure
< 300 nm features

Maskless lithography UV Direct Laser Writer

The POLOS Direct Laser Writers are versatile UV direct laser writer tools with ultra high precision components, specifically designed to give the user the highest degree of freedom to create microstructures in photosensitive layers. It has the highest resolution in the market with a 405 nm laser

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photolitho
Beam Maskless Lithography System
Maskless Lithography Systems
POLOS
POLOS Beam
130 x 130 mm
Table-top system
photolitho
PM-100
Maskless Lithography Systems
POLOS
POLOS PM-100 - UV Direct Laser Writer
POLOS PM-100 is a Laser Writer with highest degree of freedom to create microstructures in photosensitive layers.
100 x 100 mm
Table-Top System
< 300 nm features
photolitho
PM-100 Start
Maskless Lithography Systems
POLOS
POLOS PM-100 Start - UV Direct Laser Writer
A versatile UV laser writer with high precision components to get the highest degree of freedom to create microstructures in photosensitive layers.
100 x 100 mm
photolitho
POLOS® BEAM XL Mk2
Maskless Lithography Systems
POLOS
POLOS BEAM XL
150 x 150 mm
Table-top system