UCUF-SB/SFC011SB-series Ultrasonic Flow Meter

The UCUF-SB ultrasonic flowmeter is designed for measuring low flow rate of hyperpure water or various chemical fluids.

All the fluid contact portions are made of PFA for the semiconductor industry, and the flowmeter has no movable portion nor mechanical sealing, such as O-ring, which may cause fluid detention. This flowmeter is most suitable for processes requiring high-level cleanliness of semiconductor manufacturing equipment, etc.

The SFC011SB is a converter for UCUF that enables simultaneous measurement of up to 6 lines. Using state-ofthe-art technologies such as Digital Signal Processing, the converter has reduced significantly the adverse effects caused by the bubbles contained in semiconductor and chemical liquid handling processes.

Features

• Energy saving and space saving
  One SFC011SB unit enables simultaneous measurement of up to six lines. In addition, daisy chaining of multiple units without resorting to crossover wiring is possible.
• High-speed processing
  30-ms processing.
• Zero adjustment
  By performing zero adjustment before measurement, you can start the measurement for the fluid under the optimum conditions.
• Abundant functions
  • The seven-segment LED display (red, 4 digits) indicates the instantaneous flow rate and status.
  • Various analog outputs of instantaneous flow rate (select according to output types).
  • Frequency output (1 kHz F.S.), error output, instantaneous flow rate upper/lower limit alarm, integrated flow rate output, and integrated flow rate upper limit alarm (open collector).
  • RS-485 communication enables parameter settings and flow rate data acquisition.
    * RS-485 communication converter (sold separately) is required.
     
• Applicable standard
  • Applicable EMC standards: EN61326-1 and EN61326–2–3
  • RoHS2 compliant

Detector

Converter