UCUF-K-series Ultrasonic Flow Meter

The UCUF-K series ultrasonic flowmeter is designed for measuring small flow rates of ultrapure water and chemical liquids. It is comprised of the UCUF-K detector and SFC converter. All wet parts of the detector are made of special-grade PFA molds for the semiconductor industry and have no moving parts or sealing mechanism such as O-rings, which would accumulate liquid components. The simple and smooth construction leaves no residues and is ideal for processes such as semiconductor manufacturing, which requires ultimate cleanliness.

Features

• EMC compliance: EN61326-1:2013/EN61326-2-3:2013
• RoHS compatible
• Liquids with kinematic viscosity of as high as 40 mm2/s can be measured.
• Accuracy: Within ±1% of the reading at flow velocity of 1 m/s or more
• A wide range of ability of 100 : 1 as a typical example
• Detector with highly clean construction
• Corrosion-resistant and easy to install

Applications

• Pure water and ultrapure water in the semiconductor manufacturing process
• Chemical feeding
• Highly corrosive chemicals
• Chemical mechanical polishing (CMP) slurries
• Process liquids of small and medium flow rate
• Ideal for flow measurement and control of cleaning and CMP processes

Compatible converter