UCUF-E-series Ultrasonic Flow Meter
UCUF-E-series Ultrasonic Flow Meter
The UCUF-E series ultrasonic flowmeter is designed for measuring small flow rates of ultrapure water and chemical liquids. It is comprised of the UCUF-E detector and SFC converter. All wet parts of the detector are made of special-grade PFA molds for the semiconductor industry and have no moving parts or sealing mechanism such as O-rings, which would accumulate liquid components. The simple and smooth construction leaves no residues and is ideal for processes such as semiconductor manufacturing, which requires ultimate cleanliness. The SFC converter significantly reduces the effect of bubbles in liquid, which cause problems in semiconductor and chemical processes.
It has an adjustment function to offset the effect on the kinematic viscosity of liquids, making the converter compatible with various chemicals. The RS485 communication function enables integrated management of the process. For details, see the Technical Guidance of the converter.
Features
- EMC compliance: EN61326-1: 2013/EN61326-2-3:2013
- RoHS compatible
- Detachable detector cables with connectors
- Liquids with kinematic viscosity of as high as 40 mm²/s can be measured
- Accuracy: Within ± 1% of the reading at flow velocity of 1 m/s or more
- A wide range of ability of 100:1 as a typical example
- Detector with highly clean construction
- Corrosion-resistant and easy to install
| Measuring medium | Liquids (Without bubbles, and homogeneously mixed) |
| Nominal diameter | 04SE, 04E: 4 mm, 06E: 6 mm, 10E: 10 mm |
| Flow range | 04SE, 04E: Min. 0 to 50 mL/min Max. 0 to 3000 mL/min 06E: Min. 0 to 400 mL/min Max. 0 to 8000 mL/min 10E: Min. 0 to 1 L/min Max. 0 to 20 L/min |
| Fluid temperature | 10 to 90°C |
| Fluid pressure | 0 to 0.5 MPa |
| Process Connection | PFA tube end |
| Accuracy | 04SE, 04E： ±1% of reading at flow rate 800 mL/min or more ±8 mL /min at flow rate less than 800 mL/min 06E： ±1% of reading at flow rate 1700 mL/min or more ±17 mL /min at flow rate less than 1700 mL/min 10E： ±1% of reading at flow rate 4.7 L/min or more ±0.047 L/min at flow rate less than 4.7 L/min |
Compatible converter
| Model | SFC3000 |
| Input | Exclusive cable with a BNC connector from detector |
| Pulse output |
Selectable from frequency pulse, totalizing pulse or fault output
|
| Current output | 4 to 20 mA DC Load resistance: Within 500 Ω |
| Low flow cutoff | 0 to 25 % F.S. |
| Communication | RS485 installed Protocol: MODBUS Up to 32 units connectable |
| Power supply | 24 VDC ±10% |
| Enclosure | IP20 Indoor use |
| Installation | DIN rail installation |
