Tokyo Keiso CO., LTD.
UCF006-series Ultrasonic Flow Meter
Tokyo Keiso CO., LTD.
UCF006-series Ultrasonic Flow Meter
Space saving
Low pressure loss
Enhanced resistance to bubbles
Complying with RoHS
The compact ultrasonic flow monitor UCF006 has significantly reduced the adverse effects caused by the bubbles contained in semiconductor processes by making the measuring tube straight with a negligible pressure loss.
The improved time resolution and high-speed signal processing have made the measurement stable in the low flow domain compared with the conventional flowmeters. This makes it ideal for semiconductor manufacturing, which requires ultimate cleanliness.
Features
- Enhanced resistance to bubbles
The bubbles contained in the liquid disturb the propagation of ultrasonic waves and cause an unstable measurement.
By making the measuring tube straight the stable measurement has been realized. - Low pressure loss
The straight measuring tube has a negligible pressure loss. It keeps a line pressure. - Saving space
A combined construction of a detector and a converter saves installation space. - Complying with
Cleared EMC test: EN61326-1: 2013
RoHS
| Measuring medium | Water | |
| Nominal diameter | 3/8" (Outside diameter Φ 9.53, Inside diameter Φ 6.35) | |
| Flow range | 0 to 8000 mL/min | |
| Fluid temperature | 10 to 80°C (0 to 50°C Ambient temperature) | |
| Fluid pressure | 0 to 0.5 MPa | |
| Process Connection | PFA tube end | |
| Accuracy | ±2% of reading at flow rate 1700 mL/min or more ±34 mL/min at flow rate less than 1700 mL/min When measuring 20°C water |
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Brand
Tokyo Keiso CO., LTD.
Product Number
UCF006
Status
Request information
