SFC3000-series Ultrasonic Flow Meter

The UCUF series ultrasonic flowmeter is designed for measuring small flow rates of ultra-pure water and chemical liquids.

All wet parts are made of special-grade PFA molds and have no moving parts or sealing mechanism, such as an O-ring, which would accumulate liquid components.

The simple and smooth construction leaves no residues and is ideal for processes such as semiconductor manufacturing, which requires ultimate cleanliness.

The SFC3000 is a converter for UCUF series ultrasonic flowmeters.

Using state-of-the-art technologies such as Digital Signal Processing, the converter has significantly reduced the adverse effects caused by the bubbles contained in semiconductor and chemical liquid handling processes.

Features

• Enhanced resistance to bubbles
• The converter is compact and lightweight with a plug-in construction easy for wiring.
• Cleared EMC test: EN61326-1: 2013 EN61326-2-3: 2013.
• RoHS compatible
• Liquids with kinematic viscosity of as high as 40 mm2/s can be measured
• Corrosion-resistant and easy to install
• Accuracy: Within ±1% of the reading at flow velocity of 1 m/s or more
• Additional functions: Error detection, Self-diagnosis
  Simple parameter setting suitable for each measuring liquid