KxS

Process Refractometer for concentration monitoring 100 1" - PFA - FUP

KxS

Process Refractometer for concentration monitoring 100 1" - PFA - FUP

Choose your size:
Define incoming clean chemicals
Achieve and ensure H2O2 concentration in CMP slurries
Correlate etch rate ER in e.g. wafer backside poly etch HF:HNO3
Optimize bath life of post-etch residue remove

INLINE CONCENTRATION MONITOR provides real-time measurement in critical processes of semiconductor wet chemical applications. The instrument integration to process environments and control systems with industrial standard communication protocols is flexible with stand-alone refractometer setups, as well as optional modular connection units and external displays.
 
Model: DCM-10 including Flow Cell Body

  • Refractive Index range, standard: Full range, nD=1.3200...1.5300 (equival by definition to 0...100%wt)
  • Output units: RIU (refractive index unit) / Conc% / g/cm3
  • Measurement precision: ± 0.025 %wt
  • Speed of response: 1s undamped
  • Optics: No mechanical adjustments and digital measurement with 4K camera element, 589 nm wavelength (sodium D-line) light emitting diode (LED), built-in Pt-1000 (1/3B) temp sensor (linearization according to IEC 751)
  • Temperature compensation: Automatic, individual zero point calibration
  • Calibration: NIST traceable calibration, verification with standard RI liquid
  • Wetted parts: PFA, Sapphire, ECTFE Secondary sealing: Kalrez 6375UP o-ring
  • Sensor housing: polypropylene(PP)
  • Process temperature: 0°C (-4°F)...85°C (185°F)
  • Ambient temperature: 0°C (-4°F)...45°C (113°F)
  • Sensor protection class: IP67, Nema 4X
  • Installation: Indoor, unclassified area
  • Sensor weight: 330g (11.6 oz)

 
Outputs and connections:

  • Digital M12 connector: 24VDC power supply and Modbus TCP/IP, conversion to other protocols with converter module, cable lengths 2-10m (6-33ft), max, 70m(230ft)
  • Analog M12 connector: 24VDC power supply and 2x independent 4-20mA outputs, normal cable length 10m(33ft), max, 200m(660ft). Max. load 1000 Ohm
  • Sensor power consumption: max. 2.5W
  • Options: Modular Connection Unit, 7” or 15” HMI, full color touch screen interface
  • Communication protocol converter: from Modbus TCP to Ethernet IP or Profinet

 

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