Process Refractometer for concentration monitoring

INLINE CONCENTRATION MONITOR provides real-time measurement in critical processes of semiconductor wet chemical applications. The instrument integration to process environments and control systems with industrial standard communication protocols is flexible with stand-alone refractometer setups, as well as optional modular connection units and external displays.

Our semiconductor fab chemical monitor is ideal for a variety of applications, including:

• Chemical blend checksum of SC-1 and SC-2
• Hard mask etching with NH3 water mixes
• Silicon wet etch with 50% KOH
• Titanium etch with H2SO4:HNO3:H3PO4 mixes
• Back side poly etch with HF:HNO3 mixtures
• Post-CMP cleans with various mixtures

Our technology is capable of monitoring a wide range of critical semiconductor chemicals, including but not limited to:

• Hydrogen peroxide (H2O2)
• Ammonium hydroxide (NH3 water)
• Dilute hydrofluoric acid (HF)
• Phosphoric acid (H3PO4)
• Hydrochloric acid (HCl)
• Sodium hydroxide (NaOH)
• Sulfuric acid (H2SO4)
• N-methyl pyrrolidone (NMP)
• Tetramethylammonium hydroxide (TMAH)
• Iso-propyl alcohol (IPA)
• Potassium hydroxide (KOH)
• Nitric acid (HNO3)
• Polyethylene glycol (PEG)
• Citric acid (C6H8O7)
• Acetic acid (CH3COOH)

 
Model: DCM-10 including Flow Cell Body

• Refractive Index range, standard: Full range, nD=1.3200...1.5300 (equival by definition to 0...100%wt)
• Output units: RIU (refractive index unit) / Conc% / g/cm3
• Measurement precision: ± 0.025 %wt
• Speed of response: 1s undamped
• Optics: No mechanical adjustments and digital measurement with 4K camera element, 589 nm wavelength (sodium D-line) light emitting diode (LED), built-in Pt-1000 (1/3B) temp sensor (linearization according to IEC 751)
• Temperature compensation: Automatic, individual zero point calibration
• Calibration: NIST traceable calibration, verification with standard RI liquid
• Wetted parts: PFA, Sapphire, ECTFE Secondary sealing: Kalrez 6375UP o-ring
• Sensor housing: polypropylene(PP)
• Process temperature: 0°C (-4 °F)...85 °C (185 °F)
• Ambient temperature: 0°C (-4 °F)...45 °C (113 °F)
• Sensor protection class: IP67, Nema 4X
• Installation: Indoor, unclassified area
• Sensor weight: 330 g (11.6 oz)

 
Outputs and connections:

• Digital M12 connector: 24VDC power supply and Modbus TCP/IP, conversion to other protocols with converter module, cable lengths 2-10m (6-33ft), max, 70m(230ft)
• Analog M12 connector: 24VDC power supply and 2x independent 4-20mA outputs, normal cable length 10m(33ft), max, 200m(660ft). Max. load 1000 Ohm
• Sensor power consumption: max. 2.5W
• Options: Modular Connection Unit, 7” or 15” HMI, full color touch screen interface
• Communication protocol converter: from Modbus TCP to Ethernet IP or Profinet

Specifications:

• Optical window material: -SR = Sapphire prism standard range RI 1.320-1.530 nD (0-100%wt)
• Electrical classification: -UC = Unclassified area
• Flow cell type: -TFC = Tube-end flow cell
• Flow cell wetted parts materials: PFA

 
You can choose process connection:

• Tube sizes: ¼”, ⅜”,  ½”, ¾” or 1”

 
You can choose optional Union fitting to flow cell

• PUS = Pillar Super 300 union sleeves both ends incl. nuts and plugs
• FUP = Flare union nuts both end incl. plugs

 
You can choose cables for DCM-10 and interfaces
Identical M12 8 pin cable for both analog and digital Modbus TCP/IP output ports, incl. power supply
SP-9000 = M12 8 pin x-code male shielded cable, free ends, PUR outer shield
 
You can choose your cable length:

• Cables length: 002 = 2 m, 6 ft
• Cables length: 005 = 5 m, 16 ft
• Cables length: 010 = 10 m, 32 ft  

You can choose your connector:

• Connector: RJ45 = RJ-45 connector attached to the cable free end
• Connector: PP-RJ45 = Patch Panel cable free ends to RJ-45 port
• Connector: RJ45-PW = RJ-45 connector with added 230/24V wall power adapter