KxS

Process Refractometer for concentration monitoring

KxS

Process Refractometer for concentration monitoring

Choose your size:
The industry standard for semiconductor fab chemical monitoring
Monitoring a wide range of critical semiconductor chemicals
Applications: Chemical blend checksum, Hard mask etching, Silicon wet etch, Titanium etch, Back side poly etch and Post-CMP

INLINE CONCENTRATION MONITOR provides real-time measurement in critical processes of semiconductor wet chemical applications. The instrument integration to process environments and control systems with industrial standard communication protocols is flexible with stand-alone refractometer setups, as well as optional modular connection units and external displays.

Our semiconductor fab chemical monitor is ideal for a variety of applications, including:

  • Chemical blend checksum of SC-1 and SC-2
  • Hard mask etching with NH3 water mixes
  • Silicon wet etch with 50% KOH
  • Titanium etch with H2SO4:HNO3:H3PO4 mixes
  • Back side poly etch with HF:HNO3 mixtures
  • Post-CMP cleans with various mixtures

Our technology is capable of monitoring a wide range of critical semiconductor chemicals, including but not limited to:

  • Hydrogen peroxide (H2O2)
  • Ammonium hydroxide (NH3 water)
  • Dilute hydrofluoric acid (HF)
  • Phosphoric acid (H3PO4)
  • Hydrochloric acid (HCl)
  • Sodium hydroxide (NaOH)
  • Sulfuric acid (H2SO4)
  • N-methyl pyrrolidone (NMP)
  • Tetramethylammonium hydroxide (TMAH)
  • Iso-propyl alcohol (IPA)
  • Potassium hydroxide (KOH)
  • Nitric acid (HNO3)
  • Polyethylene glycol (PEG)
  • Citric acid (C6H8O7)
  • Acetic acid (CH3COOH)

 
Model: DCM-10 including Flow Cell Body

  • Refractive Index range, standard: Full range, nD=1.3200...1.5300 (equival by definition to 0...100%wt)
  • Output units: RIU (refractive index unit) / Conc% / g/cm3
  • Measurement precision: ± 0.025 %wt
  • Speed of response: 1s undamped
  • Optics: No mechanical adjustments and digital measurement with 4K camera element, 589 nm wavelength (sodium D-line) light emitting diode (LED), built-in Pt-1000 (1/3B) temp sensor (linearization according to IEC 751)
  • Temperature compensation: Automatic, individual zero point calibration
  • Calibration: NIST traceable calibration, verification with standard RI liquid
  • Wetted parts: PFA, Sapphire, ECTFE Secondary sealing: Kalrez 6375UP o-ring
  • Sensor housing: polypropylene(PP)
  • Process temperature: 0°C (-4 °F)...85 °C (185 °F)
  • Ambient temperature: 0°C (-4 °F)...45 °C (113 °F)
  • Sensor protection class: IP67, Nema 4X
  • Installation: Indoor, unclassified area
  • Sensor weight: 330 g (11.6 oz)

 
Outputs and connections:

  • Digital M12 connector: 24VDC power supply and Modbus TCP/IP, conversion to other protocols with converter module, cable lengths 2-10m (6-33ft), max, 70m(230ft)
  • Analog M12 connector: 24VDC power supply and 2x independent 4-20mA outputs, normal cable length 10m(33ft), max, 200m(660ft). Max. load 1000 Ohm
  • Sensor power consumption: max. 2.5W
  • Options: Modular Connection Unit, 7” or 15” HMI, full color touch screen interface
  • Communication protocol converter: from Modbus TCP to Ethernet IP or Profinet

Specifications:

  • Optical window material: -SR = Sapphire prism standard range RI 1.320-1.530 nD (0-100%wt)
  • Electrical classification: -UC = Unclassified area
  • Flow cell type: -TFC = Tube-end flow cell
  • Flow cell wetted parts materials: PFA

 
You can choose process connection:

  • Tube sizes: ¼”, ⅜”,  ½”, ¾” or 1”

 
You can choose optional Union fitting to flow cell

  • PUS = Pillar Super 300 union sleeves both ends incl. nuts and plugs
  • FUP = Flare union nuts both end incl. plugs

 
You can choose cables for DCM-10 and interfaces
Identical M12 8 pin cable for both analog and digital Modbus TCP/IP output ports, incl. power supply
SP-9000 = M12 8 pin x-code male shielded cable, free ends, PUR outer shield
 
You can choose your cable length:

  • Cables length: 002 = 2 m, 6 ft
  • Cables length: 005 = 5 m, 16 ft
  • Cables length: 010 = 10 m, 32 ft  

You can choose your connector:

  • Connector: RJ45 = RJ-45 connector attached to the cable free end
  • Connector: PP-RJ45 = Patch Panel cable free ends to RJ-45 port
  • Connector: RJ45-PW = RJ-45 connector with added 230/24V wall power adapter

 

Options

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M12 8 pin x-code male shielded cable, free ends, connector cover
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Industrial Ethernet Switch
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Patch panel for free-end cable data wires
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Power supply
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Limit value switch for analog-relay function
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SP-9100
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Ethernet CAT6 shielded cable with RJ-45 connectors both ends
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SP-9500
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External Display - 7" Capacitive touch panel mount
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External Display - 15" Capacitive panel PC IP65 category enclosure