KxS
Process Refractometer for concentration monitoring 075 3/4" - PFA - FUP
KxS
Process Refractometer for concentration monitoring 075 3/4" - PFA - FUP
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The industry standard for semiconductor fab chemical monitoring
Monitoring a wide range of critical semiconductor chemicals
Applications: Chemical blend checksum, Hard mask etching, Silicon wet etch, Titanium etch, Back side poly etch and Post-CMP
INLINE CONCENTRATION MONITOR provides real-time measurement in critical processes of semiconductor wet chemical applications. The instrument integration to process environments and control systems with industrial standard communication protocols is flexible with stand-alone refractometer setups, as well as optional modular connection units and external displays.
Our semiconductor fab chemical monitor is ideal for a variety of applications, including:
- Chemical blend checksum of SC-1 and SC-2
- Hard mask etching with NH3 water mixes
- Silicon wet etch with 50% KOH
- Titanium etch with H2SO4:HNO3:H3PO4 mixes
- Back side poly etch with HF:HNO3 mixtures
- Post-CMP cleans with various mixtures
Our technology is capable of monitoring a wide range of critical semiconductor chemicals, including but not limited to:
- Hydrogen peroxide (H2O2)
- Ammonium hydroxide (NH3 water)
- Dilute hydrofluoric acid (HF)
- Phosphoric acid (H3PO4)
- Hydrochloric acid (HCl)
- Sodium hydroxide (NaOH)
- Sulfuric acid (H2SO4)
- N-methyl pyrrolidone (NMP)
- Tetramethylammonium hydroxide (TMAH)
- Iso-propyl alcohol (IPA)
- Potassium hydroxide (KOH)
- Nitric acid (HNO3)
- Polyethylene glycol (PEG)
- Citric acid (C6H8O7)
- Acetic acid (CH3COOH)
Model: DCM-10 including Flow Cell Body
- Refractive Index range, standard: Full range, nD=1.3200...1.5300 (equival by definition to 0...100%wt)
- Output units: RIU (refractive index unit) / Conc% / g/cm3
- Measurement precision: ± 0.025 %wt
- Speed of response: 1s undamped
- Optics: No mechanical adjustments and digital measurement with 4K camera element, 589 nm wavelength (sodium D-line) light emitting diode (LED), built-in Pt-1000 (1/3B) temp sensor (linearization according to IEC 751)
- Temperature compensation: Automatic, individual zero point calibration
- Calibration: NIST traceable calibration, verification with standard RI liquid
- Wetted parts: PFA, Sapphire, ECTFE Secondary sealing: Kalrez 6375UP o-ring
- Sensor housing: polypropylene(PP)
- Process temperature: 0°C (-4°F)...85°C (185°F)
- Ambient temperature: 0°C (-4°F)...45°C (113°F)
- Sensor protection class: IP67, Nema 4X
- Installation: Indoor, unclassified area
- Sensor weight: 330g (11.6 oz)
Outputs and connections:
- Digital M12 connector: 24VDC power supply and Modbus TCP/IP, conversion to other protocols with converter module, cable lengths 2-10m (6-33ft), max, 70m(230ft)
- Analog M12 connector: 24VDC power supply and 2x independent 4-20mA outputs, normal cable length 10m(33ft), max, 200m(660ft). Max. load 1000 Ohm
- Sensor power consumption: max. 2.5W
- Options: Modular Connection Unit, 7” or 15” HMI, full color touch screen interface
- Communication protocol converter: from Modbus TCP to Ethernet IP or Profinet
Brand
KxS
Product Number
DCM-10-TFC-SR-UC-075-PFA-FUP
Material
PFA
Width
55 mm
Height
75 mm
Depth
155 mm
Size
075 - 3/4"
Optional union fitting to flow cell
Flare union nuts both end incl. plugs
Flow cell type
Tube-end flow cell
Optical window material
Sapphire prism standard range RI 1.320-1.530 nD (0-100%wt)
Eletrical classification
Unclassified area
Status
Request information
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