Syskey

Plasma ALD

Plasma ALD

thin-films » Deposition » Plasma ALD
Syskey

Plasma ALD

Flexible substrate size up to 12 inch wafer in diameter.
Excellent thin-film uniformity of less than ±1%.
High conformity with processing of high aspect ratio and complex structures.
Brand
Syskey
Product Number
Plasma-ALD-sys
up to 12 inch
Status
Request information