Manual flat aligner (WHS-A2) 150 mm (6”)

Applications:

• Alignment - Wafer flat and notch aligners are used in the semiconductor industry to ensure that wafers are oriented correctly during various processes, such as lithography, deposition, and etching. The flat aligner has a notch or flat that corresponds to the orientation of the wafer's crystal lattice structure. This is critical because the orientation of the wafer affects the performance and functionality of the final semiconductor device.
• Lot integrity - Aligners are also used in the semiconductor industry to aid operators in performing lot integrity checks. By rotating the wafer scribe, which is the identification marking on the wafer's edge, to be visible to the operator, the operator can verify that the correct lot of wafers is being loaded into a production tool. This is an important step in preventing errors and ensuring consistent product quality.
• Edge inspection - Wafer flat and notch aligners are also used in the semiconductor industry to inspect wafers for edge defects. This macro inspection procedure is usually done under a light source and involves examining the edges of the wafer for any chips, cracks, or other imperfections. This is an important step in preventing wafer breakage during subsequent processing steps, as edge defects can weaken the wafer and cause it to break or fail. By using wafer flat and notch aligners to identify and inspect these defects, operators can take steps to prevent further processing of defective wafers and avoid costly production delays.

The WHS-A2 series is a manual wafer flat aligner designed for top and bottom bulk alignment of 150 mm (6”) wafers. It is engineered to handle compound wafers such as InP, GaAs, GaN, and SiC, ensuring accurate alignment for critical semiconductor processes, including lithography, deposition, and etching.

With its ergonomic spin-knob and lever, the WHS-A2 reduces operator fatigue while maintaining precise control over alignment. The spring-loaded stage gently engages wafers, protecting edges, enhancing yield, and reducing breakage risks.

Built with static dissipative materials, the WHS-A2 provides ESD protection by grounding both the wafer and cassette, safeguarding sensitive devices. Designed to operate in ISO 4 (Class 10 FS209E) cleanroom environments, it meets stringent contamination control requirements.

The WHS-A2 is compatible with SEMI-compliant wafer cassettes and features a quick-disconnect roller assembly for easy maintenance. It supports important tasks like lot integrity checks and edge inspection, helping operators detect defects early and prevent costly delays.

Manufactured in an ISO9001 certified facility, the WHS-A2 is CE certified, ensuring compliance with rigorous international quality and safety standards. This makes it an ideal choice for precise wafer handling in cleanroom applications.