FR-Ultra

FR-Ultra is a unit dedicated for the fast, accurate and non-destructive measurement of thick and ultra-thick semiconductor and transparent layers.

FR-Ultra is a dedicated tool for the accurate measurement of thick and ultra-thick layers from semiconducting and/or dielectric materials. Thanks to its advanced optics, FR-Ultra can measure either smooth or rough films & substrates of very high thickness.

Typical applications include:

• Thickness measurement of thick glasses (up to 2 mm in thickness either clear or haze)
• Thickness measurement of wafers (e.g. Single or Double Side Polished wafers up to 12 inch in diameter).
• FR-Ultra can be easily integrated with Cartesian and Polar stages for thickness mapping over large areas.

Features

• Single-click analysis (no need for initial guess)
• Dynamic measurements
• 800+ materials
• Multiple installations for offline analysis
• Free of-charge Software update

Applications

• Univ. & Research labs
• Semiconductors
• Polymer & Resist characterization
• Dielectric characterizations
• Hardcoat, Anodization,
• And many more… (contact us with your requirements)