FR-SCANNER-AIO-MIC-XY300 - Holistic platform

FR-Scanner-AIO-Mic-XY300 is a holistic platform for the fully automated in-depth characterization of patterned single and multilayer coatings on wafers. It provides true 300 mm of travel along X and Y axes and is suitable for accurate measurements while the sample is secured on the stage through a vacuum.
The tool is offered in a wide range of optical configurations within the 200 - 1700 nm spectral range.

FR-Scanner-AllInOne-Mic-XY300 integrates under the same roof state-of-the-art optical, electronic, and mechanical modules for the accurate & precise characterization of un-patterned and patterned films (e.g. micro-patterned surfaces, rough surfaces, etc.).
The wafer is placed on a vacuum chuck (wafer size with ≤300 mm diameter) and equipped with reflectance standards.
The characterization is performed by a powerful optical module with a spot size as small as a few μm. The motorized XY stage provides 300 mm travel on each axis with unprecedented speed, accuracy & repeatability.

FR-Scanner-AIO-Mic-XY300 provides:

• Real-time spectroscopic reflectance measurements
• Film thickness, optical properties, non-uniformity measurements, and thickness mapping
• Imaging with an integrated, USB-connected, and high-quality color camera
• Wide range of statistics for the parameters under characterization
• Semi-automatic pattern alignment capability for mapping of periodic small patterns
• Unique S/W features such as: Click2Move, Scale bar

Applications

• Semiconductors (Oxides, Nitrides, Si, Resists, etc.)
• Wafer thicknesMEMS devices (solar-cells, a-Si membranes, etc.)
• Univ. & Research labs
• Liquid Crystal displays
• Optical coatings (e.g. medical devices)
• Polymer coatings, adhesives, etc.
• And many more… (contact us with your requirements)

Features

• Single-click analysis (no need for initial guess)
• Dynamic measurements
• Measurement of optical parameters (n & k, color)
• Click2Move & Pattern alignment functions
• History and Multiple installations for offline analysis
• Free of-charge Software update

Principle of operation

The FR-Scanner-AIO-Mic-XY300 employs White Light Reflectance Spectroscopy (WLRS), measuring reflected light from films or multilayer stacks over a defined spectral range. Interference from film interfaces is analyzed to extract thickness, refractive index (n & k), and other optical properties for both free-standing and substrate-supported coatings.