FC6500 Flow Controllers for Built-in Use｜Separate-type

The FC6500 series is a separate-type flow control system that captures flow signals from various sensors in analog form and controls valves to stabilize the flow rate at the target value. It consists of a control valve, of which the wetted parts are made of fluorocarbon resin, and a flow controller.

• Flow control valve: FCV series
• Flow controller: FCA6500 series

The FC6500 series can control a wide range of flow rates with an extensive lineup of control valves. Its design with a physically separated control valve and control unit enhances safety and layout flexibility.
The FC6500 series is ideal for process management of chemical liquids and deionized water in semiconductor and other manufacturing processes.
Besides flow rate, the FC6500 series can also be used as a temperature or pressure control system by regulating the flow control valve.

Applications

For pure water/chemical equipment

Features

• Enhanced safety and layout flexibility. The flow detector and the control valve in the process fluid part are separated from the measurement and control part, ensuring enhanced protection against liquid leakage as well as greater layout flexibility.
• Support for a wide flow range. The FCV series control valves can cover a wide range of flow rates, from a minimum of 10 to 100 mL/min up to 1 to 10 L/min.
• CE marking. Complies with EU EMC, RoHS2, and low voltage requirements (EMC standards: EN61326-1: 2013, EN61326-2-3: 2013)