Wafer handling products

Cordless portable vacuum wand (WHS-V6) 100-200 mm

Wafer handling products

Cordless portable vacuum wand (WHS-V6) 100-200 mm

Choose your size:
Self-Contained 600mbar (17.7” In.Hg Barometric) Portable Vacuum
Wireless Charging/USB-C with auto-on pickup feature
Advanced HEPA (post) Filter module

Applications

  • General use: Vacuum wands are utilized to pick up and transport wafers from one location to another without adding particles.
  • Sorting: For manual wafer sorting applications, vacuum wands allow operators to move wafers safely and precisely within a parent lot. They can also be used to combine lots together, add test wafers, and replace any damaged wafers, as necessary.
  • Inspection - Operators can use vacuum wands to pull out a wafer from a parent lot and inspect it under specialized lighting to look for defects. This ensures that the process has been successful and that the wafer meets the required specifications
  • Rescue – Vacuum wands can be used to remove stranded substrates from cassettes, pods, and process tools when automation underperforms.

 

The WHS-V6-200 is an advanced 150-200 mm tabletop portable battery-powered vacuum wand provides mobility to go anywhere in the cleanroom. The powerful vacuum pump, high performance battery and auto-shutoff holder allows this system to be used in a high production environment for multiple days on one charge. Ships with 150-200 mm vacuum tip (WHS-V1-AP4NST).  Designed for wafer rescue or light-production, ISO 3, FS209E Class 1.

Other products of interest

wafer-handling
WHS-V7-200
Portable Wand
Wafer handling products
Tabletop portable wand (WHS-V7) 100-200 mm
The WHS-V7 Serie FWAHAS2 is advanced technology 150-200mm tabletop portable battery-powered vacuum wand allows independance from vacuum lines. Provides mobility
100-200 mm
Including: WHS-V1-AP4NST PEEK Vacuum Tip
wafer-handling
WHS-V1-AP6NST
Vacuum and Vespel Tips
Wafer handling products
Vacuum Tip 300 mm Straight
The WHS-V1 Serie T3PKAS1 is antistatic conductive PEEK vacuum wand tip for general handling of substrates in a cleanroom environment. Features 50x75mm 3° o
300 mm
Press Fit
Straight
wafer-handling
WHS-V1-AP4NST
Vacuum and Vespel Tips
Wafer handling products
Vacuum Tip PEEK 100-200 mm Straight
The WHS-V1 Serie T794PKAS is antistatic conductive PEEK vacuum wand tip for general handling of substrates in a cleanroom environment.
100-200 mm
Press Fit
Straight
process-cassettes
eWB0051-eM-01-BLK
Wafer Process Boats
ePAK
Process Boat - Conductive Polypropylene 6" (150 mm)
6" (150 mm)
150 mm
25
Black