CMP Polishing pads

Full Process Coverage & Product Replacement Capability:
We offer a complete range of CMP polishing pads, covering both hard and soft pad types. These pads are engineered to support the full spectrum of CMP process steps, from oxide to metal layers, and are compatible with mainstream polishing platforms. This enables fabs to replace existing pad types with Dinglong’s solutions without compromising performance or process stability.

Hard polishing pad for IC
In semiconductor manufacturing, hard polishing pads serve as key consumables that achieve global nanoscale planarization by integrating chemical corrosion with mechanical abrasion.

Soft polishing pad for IC/SDO
In semiconductor fabrication, soft polishing pads serve as key consumables for fine and final polishing steps. Their superior surface conformity relative to hard pads enables better accommodation of wafer topography, minimizing micro-scratches and achieving higher surface smoothness.

Advanced polishing Pad for Third-Generation Semiconductors
These advanced polishing pads are engineered specifically for third-generation semiconductors, enabling nanoscale flatness through the combined action of chemical corrosion and mechanical abrasion. Because materials like SiC and GaN are extremely hard (with SiC reaching a Mohs hardness of 9.5), traditional pads often fail to meet process requirements. As a result, specialized materials and structural designs are used to balance hardness and flexibility, helping to reduce wafer-surface defects.

Customizable Performance
These CMP pads are designed with flexibility in mind. They can be customized to suit various wafer materials such as silicon, silicon carbide, and low-k dielectrics and tailored to specific process conditions. This ensures optimal material removal rates, surface planarity, and defect control across diverse applications.

View the datasheet for more product related information.

Contact SPS-International today to learn more about the possibilities of these CMP pads and receive a custom quote.