8" (200 mm) ePOD-PRO SMIF POD

Standard mechanical interface POD

• 8" (200 mm)
• SEMI/FIMS compliant
• Automated operation minimizes potential contamination from human interaction
• Automation opening and closing
• Ultrapure, low outgassing materials protect wafers
• Robust wafer retention ensures reduced particle generation
• Wide application range and strong universality.
• Shrapnel structure is easy to install and disassemble.