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ePAK

6" (150 mm) ePOD-PRO SMIF POD

ePAK

6" (150 mm) ePOD-PRO SMIF POD

SEMI/FIMS compliant
Ultra-pure, low-outgassing materials, wear-resistant materials
Designed for compatibility with automated systems
UV-resistant lid available (optional)
Product description
Specifications

Key Features:

  • The fully enclosed structure ensures wafers remain in an ultra-clean environment during transport
  • Optional built-in RFID for real-time wafer status tracking
  • Washable design for easy decontamination (removes particle contaminants)
  • Includes N₂ purge ports for purging particles
  • UV-resistant lid available (optional)
  • Base is equipped with standard LP interface
  • Base is equipped with kinematic coupling
  • SEMI/FIMS compliant
  • Ultra-pure, low-outgassing materials, wear-resistant materials
  • Electrostatic protection
  • Easy to clean and maintain