Applications
Single Wafer Handling
- General tool for tangential edge handling of round substrates in manual wafer process laboratory R&D applications.
- Designed for secure and safe wafer holding, facilitating placement in a chemical beaker/bath to ensure chemicals reach both the front and back of the wafer.
- Gripper height accommodates up to 50 mm of liquid submersion.
- Grippers can be strategically positioned around the wafer edge, and trigger opened for lifting wafer into the tool from a flat surface.
- Grippers withstand up to 250°C short-term exposure.
Rescue
- Ideal for rescuing wafers stuck inside a process tool or automation.
- For the removal of wafers from a CMP or wafer polishing platen/pad.
The WHS-G3 is a precision-engineered, normally-closed three-point mechanical wafer pick designed for specialized wafer handling applications. It securely grips round substrates of 12" (300 mm) sizes, focusing on tangential edge handling. The WHS-G3 is an ideal tool for both laboratory single-wafer processing and wafer rescue operations, offering versatile performance across various environments.
Built with high-performance PTFE Teflon® grippers, the WHS-G3 withstands harsh chemicals and temperatures up to 250°C for short-term exposure. This durability makes it suitable for cleanroom use and chemical processes that require submersion of the wafer in liquids. The grippers, with a 50 mm height, allow for safe wafer handling while ensuring full immersion in chemical baths.
The tool features an adjustable stop mechanism on the trigger, allowing operators to modify spring tension for handling thin and compound wafers with care. Its ergonomic design ensures secure handling and ease of use during delicate operations, such as lifting wafers from flat surfaces or rescuing them from process tools and equipment like CMP polishers.
Manufactured in an ISO9001 certified environment and CE certified, the WHS-G3 meets stringent international standards for quality and safety. Its robust construction, paired with precision handling capabilities, makes it an indispensable tool for semiconductor labs and cleanroom environments requiring careful, reliable wafer manipulation.
An optional tabletop pedestal holder is available to keep the tool organized and clean between uses.
