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Pod openers

WHS-O Pod Openers: FOUP, SMIF & Reticle Pod Access for Semiconductor Facilities

Maintaining ultra-clean conditions is essential in foup semiconductor production, where even the smallest particles can disrupt performance. Wafer Handling Systems presents the WHS-O series pod openers—purpose-built tools that allow safe and efficient access to wafer carriers like FOUPs, SMIF pods, and reticle pod types without compromising cleanliness or structural integrity. These openers are precisely engineered to minimize contamination risks and protect delicate mechanical components in demanding semiconductor environments.

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WHS-O5 Manual FOUP/FOSB opener
WHS-O1 Manual RSP150 Pod Opener
WHS-O3 Manual RSP200 Pod Opener
WHS-O7 Manual SMIF Pod Opener
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WHS-O5 – FOUP Opener for Safe Door Removal

The WHS-O5 is a specialized foup opener tailored for situations where manual handling of 300 mm wafers within the foup semiconductor workflow is necessary. It enables safe and controlled access to FOUP (Front Opening Unified Pods) and FOSB (Front Opening Shipping Boxes). 

  • Ergonomic pistol grip for easy FOUP/FOSB door removal 
  • Tripod design keeps door upright, preventing contamination 
  • Abrasion-resistant, antistatic materials for protection 
  • Compatible with SEMI E47.1 FOUP cassettes

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WHS-O1 & WHS-O3 – Precision Tools for Reticle Pod Access

Designed specifically for RSP150 and RSP200 reticle pod types (often classified as reticle smif pod models), the WHS-O1 and WHS-O3 deliver gentle and contamination-free lid removal. Both models incorporate static-dissipative materials and a non-abrasive opening mechanism. A stainless steel arm provides a clean resting platform for the detached lid, maintaining sterility crucial for sensitive reticle pod operations in high-grade cleanrooms.

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WHS-O7 – Clean SMIF Pod Opener for 200 mm wafers

The WHS-O7 smif pod opener is engineered to open 200 mm Standard Mechanical Interface (SMIF) pods with precision. Built for cleanroom use, it ensures wafers remain undisturbed and pod mechanisms intact.

  • Precision manual opener for SEMI E19.3 and E19.4 SMIF pods 
  • Antistatic and abrasion-resistant materials for wafer protection 
  • Integrated stainless steel rack keeps lid contamination-free 
  • Compact tabletop design for efficient cleanroom use
  • ISO 3 cleanroom compliant for high-precision environments
WHS-O2 Semi Automatic RSP150 Pod Opener
WHS-O4 Semi Automatic RSP200 Pod Opener
WHS-O8 Semi Automatic Smif Pod Opener
WHS-O Pod openers all products
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WHS-O2 – Semi-Automatic RSP150 Pod Opener

The WHS-O2-RSP150 is a state-of-the-art semi-automatic pod opener engineered for efficient and safe handling of RSP150 reticle SMIF pods. Designed for cleanroom environments, it offers a single-touch operation for unlocking and locking pod lids, minimizing manual handling and contamination risk. Built with antistatic, abrasion-resistant materials and featuring a stainless-steel lid storage rack, the WHS-O2 ensures maximum protection for sensitive reticles. Fully compatible with SEMI E111 and E112 standards, this CE-certified tool enhances productivity and reliability in semiconductor lithography processes.

Explore the WHS-O Series Pod Opener Difference

The WHS-O series offers specialized pod opener tools, including the foup opener (WHS-O5), reticle pod openers (WHS-O1/O3), and smif pod opener (WHS-O7), tailored for the demands of modern foup semiconductor manufacturing. With an emphasis on clean operation, static protection, and pod integrity, each model supports safer manual access and more efficient workflows. Discover how these pod opener tools can streamline your cleanroom operations without compromising performance.