ESP Spares
From 100 mm to 300 mm ESP has been providing CMP retaining rings to the semiconductor market since 1994. Their experience covers basic common materials to exotic material formulations and custom ring designs.
Main activities:
- Retaining Rings
- NSK Motor Refurbishment
- Fluoropolymer coating
- Axcelis Fusion bake (Gemini) thermochuck replacement
CMP
Fluoropolymer coating
Retaining rings
The latest ESP Spares products
spare-parts
AX-200-TCR
Chucks
ESP Spares
Improved Axcelis fusion bake gemini thermochuck replacement for the Gemini photostabilizer with Axelis part number 110165060
