
ESP Spares
From 100 mm to 300 mm ESP has been providing CMP retaining rings to the semiconductor market since 1994. Their experience covers basic common materials to exotic material formulations and custom ring designs.
Main activities:
- Retaining Rings
- NSK Motor Refurbishment
CMP

Retaining rings
SPARE PARTS

Chucks
The latest ESP Spares products
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SPM-RRA
Retaining rings
ESP Spares
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SPM-RRI
Retaining rings
ESP Spares
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SPM-RRL
Retaining rings
ESP Spares
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SPM-RRSF
Retaining rings
ESP Spares
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SPM-RRS
Retaining rings
ESP Spares
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SPM-RRE
Retaining rings
ESP Spares
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AX-200-TCR
Chucks
ESP Spares
Improved Axcelis fusion bake gemini thermochuck replacement for the Gemini photostabilizer. High quality with reinforced waterline fitting, minimized change of








