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Spin process - 150 mm Integrators

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Spin process - 200 mm Integrators

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Spin process - 300 mm Integrators

(1)

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Substrate Holder

(1)

Material

NPP

PTFE

Wafer size

Up to 6" (150 mm)

Substrate size

Up to 4" x 4" (100 mm)

Type

Integrator

Drive unit

Up to 12.000 RPM

Acceleration/Deceleration

1-30.000 RPM

Programs

CCW rotation and puddle option

CW

Spin process - 150 mm Integrators

2products

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wetprocess

SPIN150x Advanced - Spin coater POLOS® - Integrator Model

SPIN150X-ADVANCED-INT

Spin process - 150 mm Integrators

POLOS

SPIN150x Advanced - Spin coater POLOS® - Integrator Model

Up to 6" (150 mm)

Up to 4" x 4" (100 mm)

Desktop version

Up to 12.000 RPM

1-30.000 RPM

CW, CCW rotation and puddle option

2 Sizes:

SPIN150x Advanced - Spin coater POLOS® - Integrator Model NPP

SPIN150x Advanced - Spin coater POLOS® - Integrator Model PTFE

wetprocess

SPIN150x Standard - Spin coater POLOS® - Integrator Model

SPIN150X-INT

Spin process - 150 mm Integrators

POLOS

SPIN150x Standard - Spin coater POLOS® - Integrator Model

Up to 6" (150 mm)

Up to 4" x 4" (100 mm)

Desktop version

Up to 12.000 RPM

1-30.000 RPM

CW, CCW rotation and puddle option

2 Sizes:

SPIN150x Standard - Spin coater POLOS® - Integrator Model NPP

SPIN150x Standard - Spin coater POLOS® - Integrator Model PTFE

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