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1-Cassette Sorter
(3)
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4-Cassette Sorter
(6)
Wafer Size
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6" (150mm) - 8" (200mm)
8" (200mm)
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4-Cassette Sorter

6products
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wafer-handling
FCS1500
4-Cassette Sorter
TBP
6" (150mm) 4-Cassette Sorter
6" (150mm)
Horizontal Handling
Without OCR
wafer-handling
FCS1500-OCR
4-Cassette Sorter
TBP
6" (150mm) 4-Cassette Sorter / Aligner - with OCR
6" (150mm)
Horizontal Handling
With OCR
wafer-handling
FCS2000
4-Cassette Sorter
TBP
8" (200mm) 4-Cassette Sorter
8" (200mm)
Horizontal Handling
Without OCR
wafer-handling
FCS2000-OCR
4-Cassette Sorter
TBP
8" (200mm) 4-Cassette Sorter / Aligner - with OCR
8" (200mm)
Horizontal Handling
With OCR
wafer-handling
FCS2015
4-Cassette Sorter
TBP
6" (150mm) & 8" (200mm) 4-Cassette Sorter
6" (150mm) - 8" (200mm)
Horizontal Handling
Without OCR
wafer-handling
FCS2015-OCR
4-Cassette Sorter
TBP
6" (150mm) & 8" (200mm) 4-Cassette Sorter / Aligner - with OCR
6" (150mm) - 8" (200mm)
Horizontal Handling
With OCR