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1-Cassette Sorter
(3)
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4-Cassette Sorter
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Wafer Size
(6") 150 mm
(6") 150 mm - (8") 200 mm
(8") 200 mm
System
Horizontal Handling
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4-Cassette Sorter

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wafer-handling
(6") 150 mm 4-Cassette Sorter
FCS1500
4-Cassette Sorter
TBP
(6") 150 mm 4-Cassette Sorter
(6") 150 mm
Horizontal Handling
Without OCR
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wafer-handling
(6") 150 mm 4-Cassette Sorter / Aligner - with OCR
FCS1500-OCR
4-Cassette Sorter
TBP
(6") 150 mm 4-Cassette Sorter / Aligner - with OCR
(6") 150 mm
Horizontal Handling
With OCR
View product
wafer-handling
(8") 200 mm 4-Cassette Sorter
FCS2000
4-Cassette Sorter
TBP
(8") 200 mm 4-Cassette Sorter
(8") 200 mm
Horizontal Handling
Without OCR
View product
wafer-handling
(8") 200 mm 4-Cassette Sorter / Aligner - with OCR
FCS2000-OCR
4-Cassette Sorter
TBP
(8") 200 mm 4-Cassette Sorter / Aligner - with OCR
(8") 200 mm
Horizontal Handling
With OCR
View product
wafer-handling
(6") 150 mm - (8") 200 mm 4-Cassette Sorter
FCS2015
4-Cassette Sorter
TBP
(6") 150 mm - (8") 200 mm 4-Cassette Sorter
(6") 150 mm - (8") 200 mm
Horizontal Handling
Without OCR
View product
wafer-handling
(6") 150 mm - (8") 200 mm 4-Cassette Sorter / Aligner - with OCR
FCS2015-OCR
4-Cassette Sorter
TBP
(6") 150 mm - (8") 200 mm 4-Cassette Sorter / Aligner - with OCR
(6") 150 mm - (8") 200 mm
Horizontal Handling
View product