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1-Cassette Sorter
(3)
2-Cassette Sorter
(2)
4-Cassette Sorter
(6)
Brand
TBP
WHS
Height
1700 mm
Width
373 mm
Depth
871 mm
Material
End Effector: Carbon Fiber
Wafer Size
100 mm (4")
150 mm (6”)
200 mm (8”)
6" (150mm)
6" (150mm) - 8" (200mm)
8" (200mm)
Dual Size 150 + 200 mm (6”- 8”)
System
Automatic system
Horizontal Handling
Slots
Up to 26
With OCR
Without OCR
Throughput
700 wph
Facilities
20-240VAC vacuum
ISO
3

2-Cassette Sorter

2products
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wafer-handling
CTS-Serie
2-Cassette Sorter
TBP
2-Cassette Sorter
6 Sizes:
2-Cassette Sorter 6" (150mm)2-Cassette Sorter 6" (150mm)  / Aligner - with OCR2-Cassette Sorter 8" (200mm)More...
wafer-handling
WHS-T4
2-Cassette Sorter
WHS
2-Cassette Sorter with OCR
100 mm (4”), 150 mm (6”) or 200 mm (8”) wafers
Automatic
25 Slots
4 Sizes:
2-Cassette Sorter with OCR 100 mm (4")2-Cassette Sorter with OCR 150 mm (6”)2-Cassette Sorter with OCR Dual Size 150 + 200 mm (6”- 8”)More...