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Material
Anti-Static POM
Wafer size
150 mm (6”)
200 mm (8”)
System
Automatic system
Slots
Up to 25
Up to 26
Material roller
Anti-Static PU
Aligning accuracy
Better than +/- 1°
ISO
3

Automatic Notch Aligner

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wafer-handling
WHS-A3
Automatic Notch Aligner
WHS
Automatic notch aligner (WHS-A3)
The WHS-A3 Serie ANFEZ Advanced technology automatic wafer notch aligner for alignment of 200 mm wafers.
200 mm (8”)
Automatic System
Wafers for 25 Slot Cassettes
2 Sizes:
Automatic notch aligner (WHS-A3) 150 mm (6”)Automatic notch aligner (WHS-A3) 200 mm (8”)