Thin Films

Systems for thin films, ranging from CVD and ALD atomic layer
deposition to gas filters and heating elements for diffusion ovens.

Electron Beam Evaporation

152-electron-beam-evaporation

Categories

924-e-beam-evaporation-system
E-Beam Evaporation System
937-lift-off
Lift-Off
936-uhv-e-beam
UHV E-Beam

Electron beam deposition is a practical and highly reliable system. Our system can use a single large crucible for mass production, or multiple crucibles to achieve a multilayer film structure. We support semiconductor research and large equipment design. Planetary rotation design for single and multi-substrate can control the evaporation rate, the film thickness and uniformity is less than +/- 3%.