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Edge Polish System
(2)Edge Polish Tape
(1)Wafer size
12 inch
Weight
± 3200 kg
Wafer thickness
775± 60 μm
Air pressure
0.5-0.8 MPa
Water pressure
0.2-0.4 MPa
Exhaust ventilation
Exhaust amount 300 m3 /hour
Edge Polish System
2products
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Edge Polish
Refine
Category
Edge Polish System
(2)Edge Polish Tape
(1)Wafer size
12 inch
Weight
± 3200 kg
Wafer thickness
775± 60 μm
Air pressure
0.5-0.8 MPa
Water pressure
0.2-0.4 MPa
Exhaust ventilation
Exhaust amount 300 m3 /hour
Apply filters
polishing
NME 123N
Edge Polish System
MIPOX
12 inch
± 3200 kg
775± 60 μm
0.5-0.8 MPa
0.2-0.4 MPa
Exhaust amount 300 m3 /hour
polishing
TUNeDGE SFF-200TX
Edge Polish System
MIPOX