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Mask size
6”x6”x0.250”
Material gripper
Antistatic Polyoxymethylene 
Material gripper insert
Viton elastomer
Grip Hold
Normally closed
Cleanliness
ISO 3 (Class 1 FS209E)

EUV mask pick

The 4-gripper WHS-L3-6250 is a normally closed (consistent-force) side grip mechanical pick for handling 6”x6”x0.250” advanced EUV reticles from the tangential edge to reduce contamination by eliminating contact with chrome. Gripper placement is based on industry EUV reticle storage pods. Advanced gripper manufacturing for longevity, antistatic properties, and general chemical resistance.

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photolithography
WHS-L3-6250
EUV mask pick
Wafer handling products
IEV mask grip - 6”x6”x0.250” (WHS-L3)
6”x6”x0.250”
Antistatic Polyoxymethylene 
Viton elastomer
Normally closed
ISO 3 (Class 1 FS209E)