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Maskless Lithography Systems
(5)
Wafer size
100 x 100 mm
106 x 106 mm
150 x 150 mm
Up to 100 mm (4") wafers
System type
Table-top System
Structure
< 300 nm features

Maskless lithography UV Direct Laser Writer

The POLOS Direct Laser Writers are versatile UV direct laser writer tools with ultra high precision components, specifically designed to give the user the highest degree of freedom to create microstructures in photosensitive layers. It has the highest resolution in the market with a 405 nm laser

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photolithography
Beam Maskless Lithography System
Maskless Lithography Systems
POLOS
POLOS Beam
106 x 106 mm
Table-top system
Photolithography
PM-100
Maskless Lithography Systems
POLOS
POLOS PM-100 - UV Direct Laser Writer
POLOS PM-100 is a Laser Writer with highest degree of freedom to create microstructures in photosensitive layers.
100 x 100 mm
Table-Top System
< 300 nm features
Photolithography
PM-100 Start
Maskless Lithography Systems
POLOS
POLOS PM-100 Start - UV Direct Laser Writer
A versatile UV laser writer with high precision components to get the highest degree of freedom to create microstructures in photosensitive layers.
100 x 100 mm
photolithography
POLOS-PrintUV-Standard
Maskless Lithography Systems
POLOS
POLOS PrintUV Standard
Up to 100 mm (4") wafers
Table-top System
photolithography
POLOS® BEAM XL Mk2
Maskless Lithography Systems
POLOS
POLOS BEAM XL
150 x 150 mm
Table-top system