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Maskless Lithography Systems
(5)Wafer size
100 x 100 mm
106 x 106 mm
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Up to 100 mm (4") wafers
System type
Table-top System
Structure
< 300 nm features
Maskless lithography UV Direct Laser Writer
The POLOS Direct Laser Writers are versatile UV direct laser writer tools with ultra high precision components, specifically designed to give the user the highest degree of freedom to create microstructures in photosensitive layers. It has the highest resolution in the market with a 405 nm laser
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Maskless Lithography Systems
Refine
Category
Maskless Lithography Systems
(5)Wafer size
100 x 100 mm
106 x 106 mm
150 x 150 mm
Up to 100 mm (4") wafers
System type
Table-top System
Structure
< 300 nm features
Apply filters
photolithography
Beam Maskless Lithography System
Maskless Lithography Systems
POLOS
106 x 106 mm
Table-top system
Photolithography
PM-100
Maskless Lithography Systems
POLOS
POLOS PM-100 is a Laser Writer with highest degree of freedom to create microstructures in photosensitive layers.
100 x 100 mm
Table-Top System
< 300 nm features
Photolithography
PM-100 Start
Maskless Lithography Systems
POLOS
A versatile UV laser writer with high precision components to get the highest degree of freedom to create microstructures in photosensitive layers.
100 x 100 mm
photolithography
POLOS-PrintUV-Standard
Maskless Lithography Systems
POLOS
Up to 100 mm (4") wafers
Table-top System
photolithography
POLOS® BEAM XL Mk2
Maskless Lithography Systems
POLOS
150 x 150 mm
Table-top system