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150 MM
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(2)Spray Coating
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(14)Chuck
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(2)Wafer size
Max. spray area: 150 mm x 150 mm
Max. spray area: 300 mm x 300 mm
Max. spray area: 600 mm x 600 mm
Substrate size
Spray width: < 100mm
Spray width: 1 mm to 100 mm
Type
Stand-Alone System
Tabletop
Spray Coating
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Category
150 MM
(4)200 MM
(2)300 MM
(3)450 MM
(2)Spray Coating
(4)Options POLOS
(14)Chuck
(11)Chuck Adapter
(5)Chuck Foil
(2)Wafer size
Max. spray area: 150 mm x 150 mm
Max. spray area: 300 mm x 300 mm
Max. spray area: 600 mm x 600 mm
Substrate size
Spray width: < 100mm
Spray width: 1 mm to 100 mm
Type
Stand-Alone System
Tabletop
Apply filters
Photolithography
POLOS-PC330
Spray Coating
POLOS
POLOS® Table-Top Photoresist Spray Coating Systems are used for precision coating in R&D and small volume production. Typical applications include photo
Max. spray area: 300 mm x 300 mm
Spray width: 1 mm to 100 mm
Tabletop
Photolithography
POLOS-UC320
Spray Coating
POLOS
Max. spray area: 150 mm x 150 mm
Spray width: 1 mm to 100 mm
Tabletop
Photolithography
POLOS-UC330
Spray Coating
POLOS
The POLOS® Ultrasonic Spray Coating System is used for high-precision coating in R&D and small volume production.
Max. spray area: 300 mm x 300 mm
Spray width: 1 mm to 100 mm
Tabletop
photolithography
POLOS-UC360c
Spray Coating
POLOS
Allows highly precision nano-particle coating with more efficient photoresist consumption compared to standard photoresist application techniques.
Max. spray area: 600 mm x 600 mm
Spray width: < 100mm
Stand-Alone System