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Material

N/A

Wafer size

Lid and Bowl Liner

Substrate size

Thickness: 0.5 mm

Type

Consists of 20 sets

Frequency: 50 Hz

Hands-free usage

Programs

Vacuum activation

Options POLOS

14products

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Filter

Photolithography

Drain Hose (DEXT-NPP1.5)

29243

Options POLOS

POLOS

Drain Hose (DEXT-NPP1.5)

Photolithography

Centering Aid (F-S-SPIN200x)

37596

Options POLOS

POLOS

Centering Aid (F-S-SPIN200x)

Photolithography

Centering Aid (F-S-SPIN150x)

37819

Options POLOS

POLOS

Centering Aid (F-S-SPIN150x)

photolithography

POLOS foot pedal (3 pedals)

42870

Options POLOS

POLOS

POLOS foot pedal (3 pedals)

Hands-free usage

Vacuum activation

Photolithography

DISPENSER PERFORMUS X100 100PSI/7BAR

DS-PER- X100

Options POLOS

POLOS

Photolithography

Performus V Dispense System (Art. 7012334)

DS-PER-V

Options POLOS

POLOS

Performus V Dispense System (Art. 7012334)

photolithography

DISPENSER PERFORMUS X15

DS-PER-X15

Options POLOS

POLOS

Photolithography

Full PTFE Dispense Vessel including:

DV-PTFE

Options POLOS

POLOS

Full PTFE Dispense Vessel including:

Photolithography

Vacuum Pump (Oilfree)

N 840 FT.18

Options POLOS

POLOS

Photolithography

NE-9000B Peristaltic Pump SPINi KIT - HIGH Flow

NE-9000B-KIT

Options POLOS

POLOS

NE-9000B Peristaltic Pump SPINi KIT - HIGH Flow

Photolithography

NE-9000G Peristaltic Pump SPINi KIT - LOW Flow

NE-9000G-KIT

Options POLOS

POLOS

Photolithography

Vacuum Pump (Oil-less)

POLOS Vacuum Pump

Options POLOS

POLOS

Vacuum Pump (Oil-less)

2 Sizes:

Vacuum Pump (Oil-less) VP-115V

Vacuum Pump (Oil-less) VP-230V

1

2

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