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Material
NPP
PTFE
Wafer size
150 mm (Up to 6")
Substrate size
Up to 4" x 4" (100 mm)
Type
Integrator
Tabletop
Drive unit
Up to 12.000 RPM
Acceleration/Deceleration
1-30.000 RPM
Programs
CCW rotation and puddle option
CW

150 MM

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photolithography
SPIN150x-ADVANCED-INTEGRATOR
150 MM
POLOS
SPIN150x Advanced - Spin coater POLOS® - Integrator model
150 mm (Up to 6")
Up to 4" x 4" (100 mm)
Integrator
2 Sizes:
SPIN150x Advanced - Spin coater POLOS® - Integrator model NPPSPIN150x Advanced - Spin coater POLOS® - Integrator model PTFE
photolithography
SPIN150x-ADVANCED-TABLETOP
150 MM
POLOS
SPIN150x Advanced - Spin coater POLOS®
150 mm (Up to 6")
Up to 4" x 4" (100 mm)
Tabletop
2 Sizes:
SPIN150x Advanced - Spin coater POLOS® NPPSPIN150x Advanced - Spin coater POLOS® PTFE
photolithography
SPIN150X-STANDARD-INTEGRATOR
150 MM
POLOS
SPIN150x Standard - Spin coater POLOS® - Integrator model
150 mm (Up to 6")
Up to 4" x 4" (100 mm)
Integrator
2 Sizes:
SPIN150x Standard - Spin coater POLOS® - Integrator model NPPSPIN150x Standard - Spin coater POLOS® - Integrator model PTFE
photolithography
SPIN150X-Standard-TABLETOP
150 MM
POLOS
SPIN150x Standard - Spin coater POLOS®
150 mm (Up to 6")
Up to 4" x 4" (100 mm)
Tabletop
Up to 12.000 RPM
1-30.000 RPM
CW, CCW rotation and puddle option
2 Sizes:
SPIN150x Standard - Spin coater POLOS® NPPSPIN150x Standard - Spin coater POLOS® PTFE