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Category
150 MM
(4)200 MM
(2)300 MM
(3)450 MM
(2)Spray Coating
(4)Options POLOS
(14)Chuck
(11)Chuck Adapter
(5)Chuck Foil
(2)Material
NPP
PTFE
Wafer size
150 mm (Up to 6")
Substrate size
Up to 4" x 4" (100 mm)
Type
Integrator
Tabletop
Drive unit
Up to 12.000 RPM
Acceleration/Deceleration
1-30.000 RPM
Programs
CCW rotation and puddle option
CW
150 MM
4products
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Filter
Coating
Refine
Category
150 MM
(4)200 MM
(2)300 MM
(3)450 MM
(2)Spray Coating
(4)Options POLOS
(14)Chuck
(11)Chuck Adapter
(5)Chuck Foil
(2)Material
NPP
PTFE
Wafer size
150 mm (Up to 6")
Substrate size
Up to 4" x 4" (100 mm)
Type
Integrator
Tabletop
Drive unit
Up to 12.000 RPM
Acceleration/Deceleration
1-30.000 RPM
Programs
CCW rotation and puddle option
CW
Apply filters
photolithography
SPIN150x-ADVANCED-INTEGRATOR
150 MM
POLOS
150 mm (Up to 6")
Up to 4" x 4" (100 mm)
Integrator
photolithography
SPIN150x-ADVANCED-TABLETOP
150 MM
POLOS
150 mm (Up to 6")
Up to 4" x 4" (100 mm)
Tabletop
photolithography
SPIN150X-STANDARD-INTEGRATOR
150 MM
POLOS
150 mm (Up to 6")
Up to 4" x 4" (100 mm)
Integrator
photolithography
SPIN150X-Standard-TABLETOP
150 MM
POLOS
150 mm (Up to 6")
Up to 4" x 4" (100 mm)
Tabletop
Up to 12.000 RPM
1-30.000 RPM
CW, CCW rotation and puddle option