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Chuck
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Category
SPIN150x-200x
(5)SPIN200x Advanced
(1)SPIN300x Advanced
(1)POLOS-450
(1)Spray Coating
(3)SPIN4000A-5000A
(3)Options POLOS
(13)Chuck
(11)Chuck Adapter
(5)Chuck Foil
(2)Material
NPP
PTFE
Wafer size
4" (100 mm)
6" (150 mm)
Substrate size
100 mm
100 x 100 mm
127 x 127 mm
150 mm
50 x 50 mm
75 mm
Type
Mechanical Chuck
Vacuum Chuck
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Photolithography
26545
Chuck
POLOS
4" (100 mm)
75 mm
Vacuum Chuck
Photolithography
26560
Chuck
POLOS
6" (150 mm)
127 x 127 mm
Mechanical Chuck
photolithography
27048
Chuck
POLOS
6" (150 mm)
150 mm
Mechanical Chuck
Photolithography
28082
Chuck
POLOS
Vacuum Chuck
Photolithography
28082PTFE
Chuck
POLOS
Vacuum Chuck
Photolithography
31006
Chuck
POLOS
6" (150 mm)
100 x 100 mm
Vacuum Chuck
Photolithography
31252
Chuck
POLOS
Vacuum Chuck
Photolithography
31857
Chuck
POLOS
Vacuum Chuck
Photolithography
35914
Chuck
POLOS
4" (100 mm)
100 mm
Mechanical Chuck
Photolithography
38313
Chuck
POLOS
50 x 50 mm
Vacuum Chuck
Photolithography
42342
Chuck
POLOS
150 mm
Mechanical Chuck