WaferSense® Auto Multi Sensor™ (AMS)

Save Time. Save Expense. Improve Yields.

Speed vibration, leveling, and humidity measurements with an all-in-one measurement device. Improve yields.

Speed equipment qualification with wireless measurements.

Collect and display acceleration, vibration, leveling and humidity data. Monitor humidity in wafer environments. Use the Auto Multi Sensor with CyberSpectrum™ software for real-time equipment diagnostics. See the effects of adjustments in real-time, speeding equipment alignment and set-up.
 
Shorten equipment maintenance cycles with thin and lightweight wafer-like form factor.

Thinner 4.5 mm form factor provides access to more chambers. Operates at higher temperatures. Keep the process areas unexposed to the fab environment with vacuum compatible AMS.
 
Lower equipment maintenance expenses and enhance process uniformity with objective and reproducible data.

Take the human element out of adjusting your equipment with objective measurements for multiple applications in one. Make the right adjustments time after time. Receive early warning for impending equipment failures and optimize your preventative maintenance plans.

Semiconductor fabs and OEMs worldwide value the accuracy, precision, and versatility of the WaferSense AMS - The most efficient and effective wireless measurement device for leveling, vibration, and humidity.