Vertical Wafer Transfer - Automatic

4" (100mm) Vertical Wafer Transfer - Automatic

Model: WTM100

The WTM Mass Wafer Transfer tool is capable of wafer transfer from plastic to plastic. With the automatic system it is possible to transfer all wafers of a cassette to the other. The system is equipped with two cassette-stations, (optional) mechanical wafer notch/flat aligner and a gripper mechanism. Models are available in 100, 125, 150 and 200mm wafers.

Specifcations:

• For 4" (100mm) Wafers
• Wafer Thickness: 380um - 700um
• Vertical Mass Wafer Transfer
• Automatic System
• ESD-Safe
• No Vacuum Required (Edge Gripping)
• No Wafer Alignment (Optional)
• Throughput up to 2000 wph
• Windows Operating System
• RFID Cassette Identification on Request
• Full SECS/GEM Compliance

Possible Transfer Modes:

• Storage Cassette to Process Cassette
• Process Cassette to Teflon Cassette
• High Profile Cassette to Low Profile Cassette

*** Note: Please specify cassette model numbers when ordering ***