TBP
Vertical Wafer Transfer - Automatic 6" (150mm)
TBP
Vertical Wafer Transfer - Automatic 6" (150mm)
Choose your size:
6" (100mm) Vertical Wafer Transfer - Automatic
Model: WTM150
The WTM Mass Wafer Transfer tool is capable of wafer transfer from plastic to plastic. With the automatic system it is possible to transfer all wafers of a cassette to the other. The system is equipped with two cassette-stations, (optional) mechanical wafer notch/flat aligner and a gripper mechanism. Models are available in 100, 125, 150 and 200mm wafers.
Specifcations:
- For 6" (150mm) Wafers
- Wafer Thickness: 380um - 700um
- Vertical Mass Wafer Transfer
- Automatic System
- ESD-Safe
- No Vacuum Required (Edge Gripping)
- No Wafer Alignment (Optional)
- Throughput up to 2000 wph
- Windows Operating System
- RFID Cassette Identification on Request
- Full SECS/GEM Compliance
Possible Transfer Modes:
- Storage Cassette to Process Cassette
- Process Cassette to Teflon Cassette
- High Profile Cassette to Low Profile Cassette
*** Note: Please specify cassette model numbers when ordering ***
Brand
TBP
Product Number
WTM150
Wafer size
6" (150mm)
System
Automatic System
Slots
Optional Alignment
Status
Request information