PORVAIR
TEM-900 Series Gas Filters
PORVAIR
TEM-900 Series Gas Filters
TEM-900 Series Gas Filters
TEM-900 Series filters are specifically designed for the point-of-use filtration of critical semiconductor gases. The supported PTFE membrane construction insures the highest filtration efficiency along with virtually eliminating the possiblity of membrane rupture in the event of gas flow reversal. All filters are nitrogen purged, particle checked and repurged with nitrogen before vacuum packaging.This procedure allows for rapid clean up after installation.
Specifications:
TEM-900 Series filters are specifically designed for the point-of-use filtration of critical semiconductor gases. The supported PTFE membrane construction insures the highest filtration efficiency along with virtually eliminating the possiblity of membrane rupture in the event of gas flow reversal. All filters are nitrogen purged, particle checked and repurged with nitrogen before vacuum packaging.This procedure allows for rapid clean up after installation.
Specifications:
- Material: All Teflon® / PTFE
- Flow Rate: 0-30 L/min
- 99.9999999% Efficient @ 0.003 Microns
- Two Layers of PTFE Membrane
- 3,000 psig operation pressure at 250°F
- Helium leak tested to 1 X 10 -9 cc/sec.
- 100% Pressure Tested
- Downstream Cleanliness Less Than 1 Particle Foot<0.1 Microns>
- Volatiles<10 ppb Moisture>
- Available with Gasket Seal, Compression and Butt Weld Tube Fittings
- Interchangeable with all Pall and Millipore Filters
Brand
PORVAIR
Product Number
TEM-900
Material
Teflon / PTFE
Flow Rate
0-30 L/min
Status
Request information
