TEM FILTER

TEM-800 Series Gas Filters

TEM FILTER

TEM-800 Series Gas Filters

TEM-800 Series Gas Filters

TEM-800 Series filters are specifically designed for filtration of critical semiconductor gases where flow rates of more than 20 liters per minute are required. The filters use a PTFE membrane in a small pleated cartridge form to provide .003 micron absolute filtration. The teflon membrane cartridge is encapsulated in a 316L stainless steel housing that is electroplished and totally welded. The final assembly is purged at a high flow rate with filtered nitrogen for initial cleanliness.

Specifications:
  • Material: Poly Pro / PTFE
  • 0-300 L/min
  • 99.9999999% Efficient @ 0.003 Microns
  • PTFE Membrane
  • 0.5 square foot Effective Filtration Area
  • 316L, 10Ra finish, electro polished stainless steel housing
  • 750 psig operation pressure at 250°F
  • Helium leak tested to 1 X 10 -9 cc/sec
  • Available with Compression, Face Seal, and N.P.T. fittings
  • Interchangeable with all Pall and Millipore Filters
  • Compatible with all Semiconductor Grade Gases