TEM FILTER

TEM-700 Series Gas Filters

TEM FILTER

TEM-700 Series Gas Filters

TEM-700 Series Gas Filters

TEM-700 Series filters are specifically designed for precision filtration of reactive and halogenated gases used thoughout the micro-electronics industry. This improved family of filters provide 99.9999% efficiency at .01 microns. Constructed exclusively of 316L stainless steel and 100% glass microfibers, there are no organic materials to interfere with semi-grade processes.

Glass fiber has long been a highly efficient filter media which eliminates common problems associated with membrane construction. It is inert and can therefore be used to filter most any gas. Glass fiber has a low Delta P and has no temperature limitations. Combined with depth-type construction which utilizes no binders or epoxies, it will not add particulate or chemical contaminates.

For added margin of safety, depth construction also provides a dirt holding capacity of 10-20 times that of membrane filters. Media migration and unloading due to pulsations is eliminated though the use of a prous sintered stainless steel filter. There are no fragil welds or glued joints as in membrane type filters, that can rupture with comonly occuring gas system pulsations.

All TEM filters are electro-polished inside and out, and nitrogen purged for total cleanliness. To insure maximum safety, all filters are helium leak checked to not exceed 1x10 -9cc/sec. All filters are also individually tested with a particule counter for guaranteed performance.

Specifications:
  • Material: Glass Fiber
  • Flow Rate: 0-100 L/min
  • For Precision Filtration of Semi Grade Gases
  • 99.9999999% Efficient @ 0.003 Microns
  • Depth-type Unbindered Glass Fiber Supported by 316L Fiber Mesh
  • Completely Free of Organic Materials
  • 316L Electro-polished Construction
  • 250 psi (17kg/cm2) 250°F
  • Helium leak tested to 1 X 10 -9 cc/sec
  • 750 F (400 C) Maximum Operating Temperature